E306.CO.UK

Sigma Instruments thin film controllers, TFM, thin film real-time monitoring and control, quartz crystal monitor, codeposition control and deposition rate control

HOME

New SystemsRefurbished SystemsE306 UpgradesE306 Servicing306 Discussion Board

Thickness MonitorsVacuum HeatingUsed Vac EquipmentSpecial Offers

Links

 

Contact Details

 
Ceramisis Ltd
29 Harley Street
London
W1G 9QR
England
 
Telephone:
+44 020 7927 6710
Fax:
+44 020 7637 0419
E-mail:
sales@e306.co.uk
 

 

 

 

 

 

 

 

 

 

 

 

Hit Counter

 

Sigma Instruments SQM-160 Real Time Multi-Head Quartz Crystal Film Thickness Monitor.

Our SQM-160 thin film thickness monitor, is a very low cost easy to use film thickness monitor, and is easily integrated into any system. With 2 quartz crystal sensor inputs as standard, but the option of 6 inputs if required, it can open and close the source shutter to give very accurate thin film deposition control.

Thin film monitoring and control systems

SQM-160 Thin Film Deposition Monitor
  • Low cost
  • Easy to use
  • multi-film capability
  • relay outputs for event control
  • 2 QCM capability
  • PC data connection

Features

  • Two to six quartz crystal measurement channels
  • Averages multiple sensors for improved accuracy
  • Displays Rate/Thickness or Frequency
  • Adjustable reading rate, resolution, and filter
  • Data collection and graphing software included

 

Sensor Inputs2 (standard) to 6 (optional)Thickness Resolution1 Å
Frequency Range4.0MHZ to 6.0MHZRate Resolution0.1 Å/s or 0.01Å/s
Measurement Period.15-2.0 sec.Frequency Resolution0.1 Hz
Frequency Accuracy.01% at 2 reading/secondRate Accuracy.5% typical
RelaysShutter
Thickness Set point
Time Set point
Crystal Fail
InputsOpen Shutter
Close Shutter
Zero Thickness
Zero Time
Dimensions88.5mm  x  212.7mm  x  196.9mmPower90-140VAC, 180-240VAC, 50-60HZ

 

Typical configuration for a full system:

SQM160, Sensor kit (BNC cable set, oscillator, crystals, head to feed through cable), Feed through, quartz crystal head.

 

 

 

 

 

Disclaimer: The E306.CO.UK website is a totally independent site and is in no way affiliated with or connected to the BOC Edwards company who are the original manufacturers of the 306 thin film deposition system.