Special Offers on high vacuum thin film deposition systems, equipment, high vacuum pumps, gauges controllers and gauges

Special Offers on high vacuum thin film deposition systems, equipment, high vacuum pumps, gauge controllers and gauges

All offers are genuine and available on a first come first served basis. Please check back regularly to see our latest offerings.

OFFER #1

Ex-Demo MiniLab T60M Manual Thermal System For Sale £29,000.00

Available from December 2008

(Above picture shows chamber with thermal source + heating)

System Specification
MiniLab T60M manual 4 pocket thermal system
Front loading 60 litre box chamber, with viewport and shutter (400mm cubed chamber)
Base of chamber fitted with 25 x Ø1" ports
Pumping by Pfifer 261 turbo pump, backed by 8cmh oil filled rotary
Simple pump / vent button controls vacuum levels
TE4 four pocket thermal source with 5v x 70a tappings, for sequential deposition
Q-pod film thickness monitor (PC not included) and manual shutter.
Variable speed sample rotation stage with quick release boss.
Modular design facilitates simple future upgrades and system flexibility
Operates off of a single 20 amp plug
Requires minimal servicing
Low cost of ownership
Available December 2008
System cost £29,000+vat ex-works.
Optional Upgrades
SQM160 film thickness monitor with automatic shutter
Sample / chamber heating via halogen lamps
Substrate heating to 700C by O2 compatible resistance element

OFFER #2
E306/MINIBOX THERMAL DEPOSITION SYSTEM
Available from November 08

This quotation covers the supply of a thermal source vacuum deposition system with sample cleaning and sample rotation stage for sequential deposition
The base unit will be a refurbished Edwards E306 vacuum evaporator with diffusion pumping system, upgraded rotary pump and the Moorfield “MiniBox” chamber conversion. The vacuum chamber is mounted on top of the Edwards base plate and a front opening door allows for easy access. The rotary pump will be an 8cm/hr in order to give rapid pump down cycles. Vacuum control will be via a manual high vacuum valve actuated from the front face of the evaporator frame. A cold cathode type vacuum gauge will report chamber vacuum levels, whilst a pirani gauge will report backing / roughing vacuum levels. Interlocks will be provided for water, vacuum and cabinet doors
1.                                        Chamber: based on the standard MiniBox 060. Stainless steel front loading box chamber, 400mm cubed (external dimensions) with standard E306 base ports all available for tooling / sources and incorporating additional ports for substrate rotation, temperature control, heating etc.
2.                                        Ultimate vacuum: 1 x 10^-6 mbar without heaters (see option) and with the E306 liquid nitrogen cryo trap filled (located immediately above the diffusion pump).
3.                                        Thin Film monitor: Q-Pod thin film monitor, one of crystal head with oscillator and cable set, and 10 of spare crystals, RS232 cable and PC software. User to supply PC
4.                                        Shutter: one source shutter, to operate discretely over the TE4 source or the substrate. Control is manual from the shutter panel.
5.                                        TE4 thermal source: four discrete crucible / filament resistive evaporator with manual crucible selection via the TE4C control unit. The source is water-cooled (option) and the electrical feed through kit provides power to the device. The TE4C will be supplied with the Edwards AC output 10V 90A LT transformer (located in the system bench), variable power control, filament current digital read out, manual filament selector switch. Note that the feed through pins are limited to 55A.
6.                                        Gas admission and control circuitry: A manual leak valve will control the admission of one gas into the vacuum chamber. The high vacuum valve will act as a manual throttle valve to screen the diffusion pump from excess gas loads. The system will be set up for Ar gas.
7.                                        Packing, carriage and insurance NOT included.
8.                                        Installation customer training NOT included.
9.                                     Price for the above £19,000.00 + vat ex works.

Options:
10.                                     Plasma Glow bar: etch electrode for sample cleaning. The unit has a 75mm aluminum insulated bar electrode with surrounding U section dark space. The electrode is powered via the Edwards AC output HT transformer (located in the system bench) controlled from a variac in the electronic console. Add £1900.00
11.                                     TE4 water cooling: water feed through kit, swagelock connectors, 6mm plumbing into existing cooling system. Add £1700.00
12.                   Special heating / rotation stage: Substrate temperature range: Ambient to 600 deg C, Thermocouple: Type K, Heating method: Nickel / Chrome resistance element, protected from deposition product by ceramic radiation plate. Heat shields: Double layer heat shields, with water-cooled outer shields. Substrate size: 100mm dia. 304L stainless platen, connected to stage shaft via quick release bayonet fitting. Add £9900.00

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Disclaimer: The E306.CO.UK website is a totally independent site and is in no way affiliated with or connected to the BOC Edwards company who are the original manufacturers of the 306 thin film deposition system.