> Ceramic Topped In Vacuum Substrate Heaters. Ceramic topped in vacuum substrate heaters are suitable for sample heating in high vacuum or inert or oxidising atmospheres. These versatile substrate heaters can be used in any orientation, as a stand alone in vacuum substrate heater, or integrated into a hot stage with substrate rotation, Z-shift movement and RF or DC substrate bias. They are very commonly supplied integrated onto their own base flange including power and thermocouple vacuum feedthroughs. The ceramic topped substrate heater is designed to mount onto the base flange but be small enough to clear the bore of the port, allowing the sample heater to be introduced into the vacuum chamber fully assembled. Samples can be placed directly onto the ceramic face of the substrate heater, or onto a substrate holder in front of the heater. The ceramic topped substrate heater can be supplied with a solid face, or with a central hole to allow a stage shaft to pass through, and rotate the substrate close to the ceramic heater face. Alternatively the ceramic topped substrate heater can be supplied on a 1" shaft, and the whole heater can rotate, with the sample attached to the face. |
The ceramic topped substrate heater can be supplied with two types of element. The most common and cost effective is with a NiCr filament potted into a ceramic holder. This enables the element to reach a maximum of 1000C in high vacuum or inert or oxidising atmospheres. If your in vacuum substrate heating needs require greater temperatures than 1000C, then a graphite element can be fitted to enable element temperatures of up to 1800C (in vacuum or inert atmosphere, 500C with O2 present (graphite element)). The ceramic topped substrate heater does not have any problem operating where a large amount of deposition product is present. It is very well shielded to ensure that deposition of conducting materials will not short out the electrical connections within the heater. Ceramisis has produced purpose built sample heater controllers to power and control these heaters. |
Heater design selection guide The following guide is an aid to selecting the correct design of ceramic topped in vacuum substrate heater to suit your requirements. It also gives an indication of the power requirements for each of the size of NiCr element (graphite element requirements are totally different). This is only a guide as power requirements can vary according to conditions. These designs are our standard most cost effective designs using a NiCr filament, where only the support length and mounting method needs to be specified to enable us to quote a price. We can also offer bespoke designs if required. If temperatures above 1000C (element temp) are required then a graphite or refractory metal element will have to be used instead of NiCr. Designs will therefore vary from those shown below, depending on maximum temperature required, but the designs below can be used as a starting point for your enquiry. Please do not hesitate to contact us if you require more help with design selection. >Download heater selection guide in pdf.(227k) Base flange mounted with central power & type K t/c vacuum feedthrough, on tubular support. 
ØA - Hot Zone | ØB - Heater o.d. | C - Length | Base flange | Tube Ø | D - Heater thickness | E - Collar thickness | Voltage - Max | Current - Max | Temperature - Max | 51mm (2") | 58mm | Custom | Custom | 1" o.d. | 16.5mm | 17mm | 115 volts | 4 amps | 1000C | | 77mm (3") | 84mm | Custom | Custom | 1" o.d. | 16.5mm | 17mm | 115 volts | 6 amps | 1000C | | 102mm (4") | 110mm | Custom | Custom | 1" o.d. | 22mm | 17mm | 115 volts | 13 amps | 1000C | | 127mm (5") | 133mm | Custom | Custom | 1" o.d. | 22mm | 17mm | 115 volts | 14.5 amps | 1000C | | 153mm (6") | 158mm | Custom | Custom | 1" o.d. | 22mm | 17mm | 115 volts | 14.5 amps | 1000C | | 178mm (7") | 185mm | Custom | Custom | 1" o.d. | 22mm | 17mm | 115 volts | 14.5 amps | 1000C | | 229mm (9") | 240mm | Custom | Custom | 1" o.d. | 22mm | 17mm | 115 volts | 17 amps | 1000C |
For temperatures over 1000C (up to 1800C max) designs will vary but be loosely based around the above designs. Element only mounted on M6 stud or 3 legs, with in vacuum power leads and ceramic beaded type K thermocouple. 
| ØA - Hot Zone | ØB - Heater o.d. | C - Length | D - Heater thickness | ØE - Heatshield o.d. | F - Shield thickness | Stud or Leg mount | Voltage - Max | Current - Max | Temperature - Max | | 53mm (2") | 58mm | Custom | 16.5mm | 63mm | 22.5mm | M6 stud | 115 volts | 4 amps | 1000C | | 78mm (3") | 83mm | Custom | 16.5mm | 93mm | 22.5mm | M6 stud | 115 volts | 6 amps | 1000C | | 106mm (4") | 111mm | Custom | 22mm | 121mm | 28mm | Both | 115 volts | 13 amps | 1000C | | 129mm (5") | 134mm | Custom | 22mm | 144mm | 28mm | Both | 115 volts | 14.5 amps | 1000C | | 154mm (6") | 159mm | Custom | 22mm | 169mm | 28mm | Both | 115 volts | 14.5 amps | 1000C | | 178mm (7") | 183mm | Custom | 22mm | 193mm | 28mm | Both | 115 volts | 14.5 amps | 1000C | | 236mm (9") | 241mm | Custom | 22mm | 251mm | 28mm | Both | 240volts | 17 amps | 1000C |
Please specify if power leads and thermocouple are to exit from the side or the rear of the element. For temperatures over 1000C (up to 1800C max) designs will vary but be loosely based around the above designs.
| Heater Controllers and Heater Power Supply | Our range of heater controllers and power supplies offer the complete solution to powering and controlling every possible kind of heating element. All our controllers are fitted with a Eurotherm 2216e PID temperature controller which enables the heater to be held at exactly the set temperature. A tuning facility enables the controller to accurately tune to the heaters requirements and therefore avoid overshooting during temperature ramping. The control enables ramping and cooling between two set points at a specified ramp rate. The heater controller can also be controlled remotely and integrated in system computer control programs via modbus RS232, RS485 and other protocols. All our heater controllers have power on / off switch to the whole unit, and an output enable switch to isolate the output from the controller. A 24v interlock circuit is also included to enable the power supply to be integrated with interlocks into other systems, or safety interlocks to be attached directly to the unit; which will switch off the output from the unit if the circuit is broken. This enables safety interlocks via make / break switches for things such as chamber lids closed, vacuum interlocks, cooling water flow, over temperature sensors etc. Our standard units are 50v or 115v burst-fire output (240v x 13 amp 50hz input). The 1kw unit is available in 3U x full 19" wide rack mount, or 3U half rack mount both with integrated transformer. Our 1.5kw unit is available in 3U half rack mount only. Above 1.5kw a separate transformer box is required. These units can be supplied with burst-fire thyristor or phase angle control thyristor which is more suitable for graphite elements. |
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